GaN growth on Si(111) substrate using oxidized AlAs as an intermediate layer

N. P. Kobayashi, J. T. Kobayashi, P. D. Dapkus, W. J. Choi, A. E. Bond, X. Zhang, D. H. Rich

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84 Scopus citations


We have demonstrated that GaN can be grown epitaxially by atmospheric pressure metalorganic chemical vapor deposition on an aluminum oxide compound layer utilized as an intermediate layer between GaN and a Si(111). X-ray diffraction measurement indicates that single-crystal hexagonal GaN with its basal plane parallel to the Si(111) plane is grown. Using a scanning electron microscope, the macroscopic evolution of GaN grown on the [formula omitted] substrate is found to be similar to that of GaN grown on a sapphire(0001) substrate. Cathodoluminescence (CL) spectrum shows a unique emission that consists of several peaks with the intensity comparable to that of the near-band-edge emission. Unique characteristics in CL spectrum are discussed in terms of a possible oxygen contamination of GaN grown on the [formula omitted] substrate.

Original languageEnglish
Pages (from-to)3569-3571
Number of pages3
JournalApplied Physics Letters
Issue number24
StatePublished - 15 Dec 1997
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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