Skip to main navigation Skip to search Skip to main content

Graded TiAlN layers deposited by electron cyclotron resonance-assisted reactive sputtering

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Fingerprint

Dive into the research topics of 'Graded TiAlN layers deposited by electron cyclotron resonance-assisted reactive sputtering'. Together they form a unique fingerprint.
Sort by

Material Science

Physics

Chemistry

Keyphrases