High-speed 3D imaging using two-wavelength parallel-phase-shift interferometry

Avner Safrani, Ibrahim Abdulhalim

Research output: Contribution to journalArticlepeer-review

25 Scopus citations

Abstract

High-speed three dimensional imaging based on twowavelength parallel-phase-shift interferometry is presented. The technique is demonstrated using a high-resolution polarization-based Linnik interferometer operating with three high-speed phase-masked CCD cameras and two quasi-monochromatic modulated light sources. The two light sources allow for phase unwrapping the single source wrapped phase so that relatively high step profiles having heights as large as 3.7 μm can be imaged in video rate with ±2 nm accuracy and repeatability. The technique is validated using a certified very large scale integration (VLSI) step standard followed by a demonstration from the semiconductor industry showing an integrated chip with 2.75 μm height copper micro pillars at different packing densities.

Original languageEnglish
Pages (from-to)4651-4654
Number of pages4
JournalOptics Letters
Volume40
Issue number20
DOIs
StatePublished - 15 Oct 2015

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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