In-line inspection impact on Cycle Time and Yield

Israel Tirkel, Noam Reshef, Gad Rabinowitz

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


Semiconductors industry constantly drives for high Yield and low Cycle Time (CT), while most current manufacturing practices consider them separately. This research investigates the relationship between CT and Yield as impacted by in-line metrology inspections of production lots. It reduces the CT accumulated due to inspections, while considering the impact on Yield as a result. The research assumes a simple Production Cell model of a mini production-line segment and evaluates different inspection policies via simulation and analytical methods. The results of ten inspection policies present a typical concave curve for Yield versus CT. Increased inspection increases both Yield and CT until the Yield reaches a maximum and starts to decline. The cause is a delay in corrective feedback of an out-of-control tool due to longer inspection waiting time. It is shown that the commonly used Fixed Measure Rate policy is inferior to some of the proposed dynamic policies. Finally, an objective function is developed to evaluate the preferred inspection policy. Future research would adapt the Production Cell model to a full production-line simulation.

Original languageEnglish
Title of host publication2008 International Symposium on Semiconductor Manufacturing, ISSM 2008
Number of pages4
StatePublished - 1 Dec 2008
Event2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008 - Tokyo, Japan
Duration: 27 Oct 200829 Oct 2008

Publication series

NameIEEE International Symposium on Semiconductor Manufacturing Conference Proceedings
ISSN (Print)1523-553X


Conference2008 17th International Symposium on Semiconductor Manufacturing, ISSM 2008

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • General Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering


Dive into the research topics of 'In-line inspection impact on Cycle Time and Yield'. Together they form a unique fingerprint.

Cite this