TY - JOUR
T1 - In-situ fabrication of three-dimensionally confined GaAs and InAs volumes via growth on non-planar patterned GaAs(001) substrates
AU - Konkar, A.
AU - Rajkumar, K. C.
AU - Xie, Q.
AU - Chen, P.
AU - Madhukar, A.
AU - Lin, H. T.
AU - Rich, D. H.
N1 - Funding Information:
This work was supported by the ARO, and ONR.
PY - 1995/1/1
Y1 - 1995/1/1
N2 - Three-dimensionally confined GaAs/AlGaAs and InAs/GaAs structures on 〈100〉 oriented square mesas patterned onto GaAs(001) substrates are realized, in-situ, via size-reducing molecular beam epitaxy. Two stages of mesa top pinch-off involving ∼ {103} and subsequently {101} side facets are revealed. GaAs and InAs quantum boxes with lateral linear dimensions down to 40 nm and confined by AlGaAs and GaAs, respectively, are reported. For InAs, the strain relief in mesas is found to enhance the well known ∼ 2 ML thickness for three-dimensional island formation on unpatterned substrates to, remarkably, 〉 5 ML for mesa size ∼ 75 nm. Cathodoluminescence emission from the InAs on the mesa top attests to its good optical quality.
AB - Three-dimensionally confined GaAs/AlGaAs and InAs/GaAs structures on 〈100〉 oriented square mesas patterned onto GaAs(001) substrates are realized, in-situ, via size-reducing molecular beam epitaxy. Two stages of mesa top pinch-off involving ∼ {103} and subsequently {101} side facets are revealed. GaAs and InAs quantum boxes with lateral linear dimensions down to 40 nm and confined by AlGaAs and GaAs, respectively, are reported. For InAs, the strain relief in mesas is found to enhance the well known ∼ 2 ML thickness for three-dimensional island formation on unpatterned substrates to, remarkably, 〉 5 ML for mesa size ∼ 75 nm. Cathodoluminescence emission from the InAs on the mesa top attests to its good optical quality.
UR - http://www.scopus.com/inward/record.url?scp=0029306539&partnerID=8YFLogxK
U2 - 10.1016/0022-0248(95)80226-3
DO - 10.1016/0022-0248(95)80226-3
M3 - Article
AN - SCOPUS:0029306539
SN - 0022-0248
VL - 150
SP - 311
EP - 316
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
ER -