| Original language | English |
|---|---|
| Patent number | ZA962478 |
| IPC | H01L C I |
| Priority date | 28/03/96 |
| State | Published - 3 Oct 1996 |
Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver
Research output: Patent
| Original language | English |
|---|---|
| Patent number | ZA962478 |
| IPC | H01L C I |
| Priority date | 28/03/96 |
| State | Published - 3 Oct 1996 |