Instantaneous high-resolution focus tracking and a vibrometery system using parallel phase shift interferometry

Michael Ney, Avner Safrani, Ibrahim Abdulhalim

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

High resolution fast focus tracking and vibrometery system based on parallel phase shift polarization interferometry using three detectors is presented. The basic design and algorithm are described, followed by an experimental demonstration showing sub nm resolution of different controlled motion profiles instantaneously monitored at a feedback rate of 100 kHz. The fact that the method does not rely on active optical components, potentially allows extremely high vibration rates to be measured; limited only by the detector bandwidth and sampling rate. In addition, the relatively simple design relies only on standard optical equipment, combined with the simple algorithm, makes the task of setting up a high performance vibrometry system cheap and readily available.
Original languageEnglish
Pages (from-to)09LT02
JournalJournal of Optics
Volume18
Issue number9
StatePublished - 2016

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