Integrating Critical Queue Time Constraints into SMT2020 Simulation Models

Denny Kopp, Michael Hassoun, Adar Kalir, Lars Monch

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper, we study the impact of critical queue time (CQT) constraints in semiconductor wafer fabrication facilities (wafer fabs). Process engineers impose CQT constraints that require wafers to start a subsequent operation within a given time window after a certain operation is completed to prevent native oxidation and contamination effects on the wafer surface. We equip dataset 2 of the SMT2020 testbed with production control logic to avoid CQT constraint violations. Therefore, two different CQT-aware dispatching rules and a combination of a lot stopping strategy with these rules are proposed. The effect of the production control strategies is investigated by means of a simulation study. We show that the number of CQT violations can be reduced without large deteriorations of global performance measures such as cycle time and throughput.

Original languageEnglish
Title of host publicationProceedings of the 2020 Winter Simulation Conference, WSC 2020
EditorsK.-H. Bae, B. Feng, S. Kim, S. Lazarova-Molnar, Z. Zheng, T. Roeder, R. Thiesing
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1813-1824
Number of pages12
ISBN (Electronic)9781728194998
DOIs
StatePublished - 14 Dec 2020
Externally publishedYes
Event2020 Winter Simulation Conference, WSC 2020 - Orlando, United States
Duration: 14 Dec 202018 Dec 2020

Publication series

NameProceedings - Winter Simulation Conference
Volume2020-December
ISSN (Print)0891-7736

Conference

Conference2020 Winter Simulation Conference, WSC 2020
Country/TerritoryUnited States
CityOrlando
Period14/12/2018/12/20

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