Integration of suspended carbon nanotubes into micro-fabricated devices

Gabriel A. Karp, Assaf Ya'Akobovitz, Moshe David-Pur, Zvi Ioffe, Ori Cheshnovsky, Slava Krylov, Yael Hanein

Research output: Contribution to journalArticlepeer-review

22 Scopus citations


The integration of suspended carbon nanotubes into micron-scale silicon-based devices offers many exciting advantages in the realm of nano-scale sensing and micro- and nano-electromechanical systems (MEMS and NEMS). To realize such devices, simple fabrication schemes are needed. Here we present a new method to integrate carbon nanotubes into silicon-based devices by applying conventional micro-fabrication methods combined with a guided chemical vapor deposition growth of single-wall carbon nanotubes. The described procedure yields clean, long, taut and well-positioned tubes in electrical contact to conducting electrodes. The positioning, alignment and tautness of the tubes are all controlled by the structural and chemical features of the micro-fabricated substrate. As the approach described consists of common micro-fabrication and chemical vapor deposition growth procedures, it offers a viable route toward MEMS-NEMS integration and commercial utilization of carbon nanotubes as nano-electromechanical transducers.

Original languageEnglish
Article number085021
JournalJournal of Micromechanics and Microengineering
Issue number8
StatePublished - 9 Nov 2009
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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