Abstract
A ray-tracing method for nondestructive mapping of three-dimensional surfaces, where the surface is made up of a large array of identical depressions, is discussed. The sample acted as isotropic sources of some detectable radiation, when marked with a uniform flux of particles. By measuring the emitted radiation from several directions, the surface can be reconstructed using a parametrization coupled with a least squares fit procedure. By using a particular sequence of alpha emitting atoms, the implementation of the algorithm to arrays of micron-scale inverted pyramids etched in GaAs substrates is reported.
| Original language | English |
|---|---|
| Pages (from-to) | 7888-7891 |
| Number of pages | 4 |
| Journal | Journal of Applied Physics |
| Volume | 95 |
| Issue number | 12 |
| DOIs | |
| State | Published - 15 Jun 2004 |
| Externally published | Yes |
ASJC Scopus subject areas
- General Physics and Astronomy