@inproceedings{22e835a1b0f14ae29ca7b82347e5c1f3,
title = "Investigation of ion-beam modified silicon by photoacoustic method",
abstract = "Thermal, elastic and electronic transport properties of ion-modified silicon samples were investigated by a photoacoustic frequency transmission technique. The experimental photoacoustic data vs the modulating frequency were measured and analyzed. The experimental results show a clear influence of the process of ion-modification on the photoacoustic signal. The thermal, elastic and electronic transport parameters of ion-modified semiconductors were obtained by comparing the experimental and calculated theoretical photoacoustic signal which provide an indicator of the degree of modification.",
author = "Todorovi{\'c}, {D. M.} and Nikoli{\'c}, {P. M.} and J. Elazar and M. Smiljani{\'c} and Boji{\v c}i{\'c}, {A. I.} and Vasiljevi{\'c}-Radovi{\'c}, {D. G.} and Radulovi{\'c}, {K. T.}",
year = "2000",
month = jan,
day = "1",
doi = "10.1109/ICMEL.2000.840566",
language = "English",
isbn = "0780352351",
series = "2000 22nd International Conference on Microelectronics, MIEL 2000 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers",
pages = "247--250",
booktitle = "2000 22nd International Conference on Microelectronics, MIEL 2000 - Proceedings",
address = "United States",
note = "2000 22nd International Conference on Microelectronics, MIEL 2000 ; Conference date: 14-05-2000 Through 17-05-2000",
}