Investigation of the interface roughness in a LPOMVPE grown AlAs/GaAs multilayer

D. Mogilyanski; E. Gartstein; M. Blumin; D. Fekete; R. Opitz; R. Kohler

doi:10.1088/0022-3727/32/10A/347

Investigation of the interface roughness in a LPOMVPE grown AlAs/GaAs multilayer

D. Mogilyanski
, E. Gartstein
, M. Blumin
, D. Fekete
, R. Opitz
, R. Kohler

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

Characteristics of the interface roughness in a low-pressure organometallic vapour phase epitaxy (LPOMVPE) grown AlAs/GaAs multilayer are studied by grazing-incidence x-ray scattering. Quantitative results are obtained by comparing experimental and theoretically calculated diffuse scattering maps. These corroborate with the features resolved by atomic force microscopy. The observed morphological features are discussed in the following sections.

Original language	English
Pages (from-to)	A239-A244
Journal	Journal of Physics D: Applied Physics
Volume	32
Issue number	10 A
DOIs	https://doi.org/10.1088/0022-3727/32/10A/347
State	Published - 21 May 1999
Event	Proceedings of the 1998 4th Biennial Conference on High Resolution X-Ray Diffraction and Topography (XTOP) - Durham, UK Duration: 9 Sep 1998 → 11 Sep 1998

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Acoustics and Ultrasonics
Surfaces, Coatings and Films

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10.1088/0022-3727/32/10A/347

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@article{77ed3b7b36ab4dd1857f6e446ddecd63,

title = "Investigation of the interface roughness in a LPOMVPE grown AlAs/GaAs multilayer",

abstract = "Characteristics of the interface roughness in a low-pressure organometallic vapour phase epitaxy (LPOMVPE) grown AlAs/GaAs multilayer are studied by grazing-incidence x-ray scattering. Quantitative results are obtained by comparing experimental and theoretically calculated diffuse scattering maps. These corroborate with the features resolved by atomic force microscopy. The observed morphological features are discussed in the following sections.",

author = "D. Mogilyanski and E. Gartstein and M. Blumin and D. Fekete and R. Opitz and R. Kohler",

year = "1999",

month = may,

day = "21",

doi = "10.1088/0022-3727/32/10A/347",

language = "English",

volume = "32",

pages = "A239--A244",

journal = "Journal of Physics D: Applied Physics",

issn = "0022-3727",

publisher = "Institute of Physics",

number = "10 A",

note = "Proceedings of the 1998 4th Biennial Conference on High Resolution X-Ray Diffraction and Topography (XTOP) ; Conference date: 09-09-1998 Through 11-09-1998",

}

TY - JOUR

T1 - Investigation of the interface roughness in a LPOMVPE grown AlAs/GaAs multilayer

AU - Mogilyanski, D.

AU - Gartstein, E.

AU - Blumin, M.

AU - Fekete, D.

AU - Opitz, R.

AU - Kohler, R.

PY - 1999/5/21

Y1 - 1999/5/21

N2 - Characteristics of the interface roughness in a low-pressure organometallic vapour phase epitaxy (LPOMVPE) grown AlAs/GaAs multilayer are studied by grazing-incidence x-ray scattering. Quantitative results are obtained by comparing experimental and theoretically calculated diffuse scattering maps. These corroborate with the features resolved by atomic force microscopy. The observed morphological features are discussed in the following sections.

AB - Characteristics of the interface roughness in a low-pressure organometallic vapour phase epitaxy (LPOMVPE) grown AlAs/GaAs multilayer are studied by grazing-incidence x-ray scattering. Quantitative results are obtained by comparing experimental and theoretically calculated diffuse scattering maps. These corroborate with the features resolved by atomic force microscopy. The observed morphological features are discussed in the following sections.

UR - https://www.scopus.com/pages/publications/0032658178

U2 - 10.1088/0022-3727/32/10A/347

DO - 10.1088/0022-3727/32/10A/347

M3 - Conference article

AN - SCOPUS:0032658178

SN - 0022-3727

VL - 32

SP - A239-A244

JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

IS - 10 A

T2 - Proceedings of the 1998 4th Biennial Conference on High Resolution X-Ray Diffraction and Topography (XTOP)

Y2 - 9 September 1998 through 11 September 1998

ER -

Investigation of the interface roughness in a LPOMVPE grown AlAs/GaAs multilayer

Abstract

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