Abstract
IR normal transmission and angular reflection spectra are studied for lamellar silicon grating-wafer structures. The grating dimensions are comparable with the radiation wavelengths 2.2-22 μm. The spectra were measured using the FTIR system. Numerical simulations of the spectra were carried out using an operator-vector version of rigorous-coupled wave analysis. The theoretical results are in agreement with the measured spectra. The effect of grating structure on the manifestation of two inherent light absorption mechanisms of bulk silicon-interstitial oxygen vibrations and lattice phonons-is discussed. The results indicate the possibility of obtaining a narrow spectral absorber.
Original language | English |
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Pages (from-to) | 639-647 |
Number of pages | 9 |
Journal | Infrared Physics and Technology |
Volume | 36 |
Issue number | 2 |
DOIs | |
State | Published - 1 Jan 1995 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics