IR transmission and reflection study of lamellar silicon grating-wafer structures

S. Hava, M. Auslender, B. M. Lacquet, P. J. Coetzer, P. L. Swart

Research output: Contribution to journalArticlepeer-review

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Abstract

IR normal transmission and angular reflection spectra are studied for lamellar silicon grating-wafer structures. The grating dimensions are comparable with the radiation wavelengths 2.2-22 μm. The spectra were measured using the FTIR system. Numerical simulations of the spectra were carried out using an operator-vector version of rigorous-coupled wave analysis. The theoretical results are in agreement with the measured spectra. The effect of grating structure on the manifestation of two inherent light absorption mechanisms of bulk silicon-interstitial oxygen vibrations and lattice phonons-is discussed. The results indicate the possibility of obtaining a narrow spectral absorber.

Original languageEnglish
Pages (from-to)639-647
Number of pages9
JournalInfrared Physics and Technology
Volume36
Issue number2
DOIs
StatePublished - 1 Jan 1995

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