Abstract
The theoretical possibility of studying the oxidation of semiconducting films by observing their electrophysical properties in a wide temperature range is shown. It is established that annealing of films of (Bi, Sb)//2Te//3 solid solutions in air in the temperature range from 450 to 600 degree K leads to the formation of high-resistivity intermediate layers corresponding to the composition (Bi, Sb)//2O//3. The thickness of the oxidized layer is estimated as a function of the annealing time and temperature. The oxygen diffusion coefficient in the temperature range from 473 to 585 degree K varies from 1. 5 multiplied by 10** minus **1**7 to 5 multiplied by 10** minus **1**5 cm**2/sec.
Translated title of the contribution | Study of the Oxidation of Films of (Bi, Sb)2Te3 Solid Solutions. |
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Original language | Russian |
Pages (from-to) | 37-41 |
Number of pages | 5 |
Journal | Izv Akad Nauk SSSR Neorg Mater |
Volume | 15 |
Issue number | 1 |
State | Published - 1 Jan 1979 |
ASJC Scopus subject areas
- General Engineering