TY - GEN
T1 - Kinematically excited large angle tilting actuator
AU - Ya'akobovitz, Assaf
AU - Krylov, Slava
PY - 2010/12/1
Y1 - 2010/12/1
N2 - We report on a novel architecture and operational principle of a large angle kinematically excited tilting micro actuator. The device transforms and amplifies small linear out-of-plane motion of a parallel-plate electrostatic transducer into a tilting motion of a plate. The device characterized by robust single layer architecture was fabricated using a silicon on insulator (SOI) wafer and common deep reactive ion etching (DRIE) based fabrication process. Experimental and model results collectively illustrate the feasibility and efficiency of the suggested actuation approach. The optical tilting angle of 37.5° was experimentally registered under relatively low actuation voltage of 100 V.
AB - We report on a novel architecture and operational principle of a large angle kinematically excited tilting micro actuator. The device transforms and amplifies small linear out-of-plane motion of a parallel-plate electrostatic transducer into a tilting motion of a plate. The device characterized by robust single layer architecture was fabricated using a silicon on insulator (SOI) wafer and common deep reactive ion etching (DRIE) based fabrication process. Experimental and model results collectively illustrate the feasibility and efficiency of the suggested actuation approach. The optical tilting angle of 37.5° was experimentally registered under relatively low actuation voltage of 100 V.
UR - http://www.scopus.com/inward/record.url?scp=80054995641&partnerID=8YFLogxK
U2 - 10.1115/DETC2010-28454
DO - 10.1115/DETC2010-28454
M3 - Conference contribution
AN - SCOPUS:80054995641
SN - 9780791844120
T3 - Proceedings of the ASME Design Engineering Technical Conference
SP - 555
EP - 560
BT - ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2010
T2 - ASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2010
Y2 - 15 August 2010 through 18 August 2010
ER -