TY - GEN
T1 - Large angle parametrically excited tilting micro actuator
AU - Ya'akobovitz, Assaf
AU - Krylov, Slava
PY - 2009/9/22
Y1 - 2009/9/22
N2 - We present novel operational principle of a tilting MEMS device based on parametric excitation and linear to angular motion transformation. The device is fabricated using a single layer of silicon on insulator (SOl) wafer and combines simple fabrication process with several beneficial features including large tilting angles, wide bandwidth, low sensitivity to deviation in geometrical and operational parameters and low actuation voltage. A theoretical feasibility and performance study was carried out using a lumped model of the device and verified by a coupled three-dimensional simulation. Parametric excitation of the tilting motion was demonstrated experimentally using and external piezoelectric transducer and tilting angles of 390 were registered. The suggested operational approach could be efficiently implemented in many MEMS based applications incorporating tilting elements including rnicrornirrors, bio medical devices and inertial sensors.
AB - We present novel operational principle of a tilting MEMS device based on parametric excitation and linear to angular motion transformation. The device is fabricated using a single layer of silicon on insulator (SOl) wafer and combines simple fabrication process with several beneficial features including large tilting angles, wide bandwidth, low sensitivity to deviation in geometrical and operational parameters and low actuation voltage. A theoretical feasibility and performance study was carried out using a lumped model of the device and verified by a coupled three-dimensional simulation. Parametric excitation of the tilting motion was demonstrated experimentally using and external piezoelectric transducer and tilting angles of 390 were registered. The suggested operational approach could be efficiently implemented in many MEMS based applications incorporating tilting elements including rnicrornirrors, bio medical devices and inertial sensors.
UR - http://www.scopus.com/inward/record.url?scp=70349164473&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:70349164473
SN - 9780791848364
T3 - 2008 Proceedings of the 9th Biennial Conference on Engineering Systems Design and Analysis
SP - 289
EP - 293
BT - 2008 Proceedings of the 9th Biennial Conference on Engineering Systems Design and Analysis
T2 - 2008 9th Biennial Conference on Engineering Systems Design and Analysis
Y2 - 7 July 2008 through 9 July 2008
ER -