Large angle parametrically excited tilting micro actuator

Keyphrases

• Tilt Angle 100%
• Large Angle 100%
• Parametrically Excited 100%
• Parametric Excitation 100%
• Microactuators 100%
• Geometrical Parameters 50%
• Operational Parameters 50%
• Device-independent 50%
• Three Dimensional Simulation 50%
• Low Sensitivity 50%
• MEMS Devices 50%
• Biomedical Devices 50%
• Operational Approach 50%
• Operating Principle 50%
• Performance Studies 50%
• Silicon-on-insulator Wafer 50%
• Angular Motion 50%
• Lumped Model 50%
• Simple Fabrication Process 50%
• Device Sensors 50%
• Wide Bandwidth 50%
• Piezoelectric Transducer 50%
• Motion Transformation 50%
• Inertial Sensors 50%
• Low Actuation Voltage 50%
• Tilting Motion 50%
• MEMS-based 50%

Engineering

• Microelectromechanical System 100%
• Parametric Excitation 100%
• Geometrical Parameter 50%
• Actuation 50%
• Silicon on Insulator 50%
• Transducer 50%
• Piezoelectric 50%
• Inertial Sensor 50%