Large angle silicon-on-insulator tilting actuator with kinematic excitation and simple integrated parallel-plate electrostatic transducer

Keyphrases

• Large Angle 100%
• Actuator 100%
• Parallel Plates 100%
• Silicon-on-insulator 100%
• Electrostatic Transducer 100%
• Tilting Actuator 100%
• Kinematic Excitation 100%
• Tilt Angle 50%
• Large Amplitude 50%
• Detailed Model 50%
• Micromechanics 50%
• Experimental Characterization 50%
• Novel Architectures 50%
• Operating Principle 50%
• Electrostatically Actuated 50%
• Elastic Torsion 50%
• Architecture Principles 50%
• Angular Motion 50%
• Out-of-plane Motion 50%
• Electrostatic Actuation 50%
• Deep Reactive Ion Etching 50%
• Plate Transducers 50%
• Dynamic Amplification Factor 50%
• Robust Architecture 50%
• Low Actuation Voltage 50%
• Insulator Substrate 50%
• MEMS Actuator 50%

Engineering

• Electrostatics 100%
• Silicon on Insulator 100%
• Transducer 100%
• Parallel Plate 100%
• Experimental Result 25%
• Actuation 25%
• Microelectromechanical System 25%
• Experimental Characterization 25%
• Plane Motion 25%
• Deep Reactive Ion Etching 25%
• Electrostatic Actuation 25%
• Peak Angle 25%