Large angle SOI tilting actuator with integrated motion transformer and amplifier

A. Ya'akobovitz, S. Krylov, Y. Shacham-Diamand

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this work we report on the novel architecture and operational principle of a tilting actuator fabricated using a single structural layer of silicon on insulator (SOI) wafer and demonstrate the functionality of the device both theoretically and experimentally. The device incorporates an integrated compliant motion amplifier realized as an eccentric elastic torsion link that transforms small out-of-plane motion of the parallel plate electrostatic transducer into large amplitude angular motion of the tilting element. A feasibility study was performed using a lumped model of the device and verified by a coupled three-dimensional simulation. Experimental and model results indicate that this generic architecture, combining simple fabrication process with robustness of SOI based devices, is efficient for static and resonant operation of various tilting micro devices.

Original languageEnglish
Title of host publicationMEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages487-490
Number of pages4
DOIs
StatePublished - 29 Aug 2008
Externally publishedYes
Event21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States
Duration: 13 Jan 200817 Jan 2008

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Country/TerritoryUnited States
CityTucson, AZ
Period13/01/0817/01/08

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