Large angle SOI tilting actuator with integrated motion transformer and amplifier

Keyphrases

• Large Angle 100%
• Transformer 100%
• Silicon-on-insulator 100%
• Tilting Actuator 100%
• Static Operation 50%
• Three Dimensional Simulation 50%
• Large Amplitude 50%
• Parallel Plates 50%
• Novel Architectures 50%
• Operating Principle 50%
• Microdevice 50%
• Structural Layers 50%
• Generic Architecture 50%
• Elastic Torsion 50%
• Architecture Principles 50%
• Silicon-on-insulator Wafer 50%
• Angular Motion 50%
• Compliant Motion 50%
• Out-of-plane Motion 50%
• Lumped Model 50%
• Electrostatic Transducer 50%
• Insulator-based 50%
• Resonant Operation 50%
• Simple Fabrication Process 50%

Engineering

• Silicon on Insulator 100%
• Amplifier 100%
• Electrostatics 33%
• Feasibility Study 33%
• Transducer 33%
• Parallel Plate 33%
• Plane Motion 33%
• Generic Architecture 33%