Laser-induced morphology changes in thin copper films

J. Bloch, Y. Zeiri

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

The interaction of Ar+ laser pulses produced by an acousto-optic modulator with copper thin films deposited on glass substrates were studied in the range of 400-5000-Å film thickness and up to 1-W beam power using reflection-transmission measurements. Two consequential processes could be distinguished, attributed to film melting and hole formation. During melting, the reflected beam changes to form scattered ring patterns. Hole formation is indicated by transmission increase. From the behavior of the reflection-transmission intensities during irradiation, the mechanism of the processes is deduced. The dependence of the processes' kinetics on beam power and film thickness is determined, and an empirical model calculation interpreting the results is presented.

Original languageEnglish
Pages (from-to)2637-2644
Number of pages8
JournalJournal of Applied Physics
Volume61
Issue number7
DOIs
StatePublished - 1 Jan 1987
Externally publishedYes

ASJC Scopus subject areas

  • General Physics and Astronomy

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