Laser writing of nitrogen-doped silicon carbide for biological modulation

Vishnu Nair, Jaeseok Yi, Dieter Isheim, Menahem Rotenberg, Lingyuan Meng, Fengyuan Shi, Xinqi Chen, Xiang Gao, Aleksander Prominski, Yuanwen Jiang, Jiping Yue, Charles T. Gallagher, David N. Seidman, Bozhi Tian