Lifetime-limited current in Cu-gate metal-oxide-semiconductor capacitors subjected to bias thermal stress

Keyphrases

• Limiting Current 100%
• Thermal Stress 100%
• Minority Carriers 100%
• Gate Metal 100%
• Metal-oxide-semiconductor Capacitor (MOSCAP) 100%
• Oxides 66%
• Carrier Generation 66%
• Current Measurement 33%
• Leakage Current 33%
• Model Fitting 33%
• Conductance 33%
• Expected Range 33%
• Time Measurement 33%
• Capacitance Measurement 33%
• Oxide Breakdown 33%
• Capacitance Variable Time 33%
• Inversion Layer 33%
• Minority Charge Carriers 33%
• Depletion Capacitance 33%
• Capacitance-voltage 33%
• Deep Depletion 33%

Material Science

• Oxide Compound 100%
• Metal Oxide 100%
• Thermal Stress 100%
• Capacitor 100%
• Oxide Semiconductor 100%
• Capacitance 66%
• Charge Carrier 33%
• Capacitance Measurement 33%

Engineering

• Thermal Stress 100%
• Minority Carriers 100%
• Metal Oxide Semiconductor 100%
• Charge Carrier 33%
• Current Measurement 33%
• Measurement Time 33%
• Fit Model 33%
• Capacitance Measurement 33%