Local heat transfer under an array of micro jet impingement using HFE-7000

Jeong Heon Shin, Tomer Rozenfeld, Tomer Shockner, Ashwin Kumar Vutha, Yingying Wang, Gennady Ziskind, Yoav Peles

Research output: Contribution to journalArticlepeer-review

18 Scopus citations


An experimental and numerical study was conducted to elucidate local heat transfer processes under multiple microscale jet impingements using a dielectric coolant, HFE-7000. The micro device used in this experiment was made of a 400-μm thick silicon wafer, a 210-μm thick vinyl sticker, and a 1-mm thick Pyrex substrate. Fourteen jet orifices were etched using deep reactive ion etching (DRIE) on the silicon wafer, and four 100-nm thick resistance temperature detectors (RTDs) and a heater were fabricated from titanium on the Pyrex substrate. The double-sided vinyl sticker was used to bond the layers and to form a micro fluidic channel having dimensions of 1.9 mm × 14.8 mm × 210 μm. Jet Reynolds numbers in the experimental study ranged from 162 to 4057 and nominal heat fluxes ranged from 10 W/cm2 to 80 W/cm2. A three-dimensional numerical model was developed to predict the jets hydrodynamics and the convection heat transfer coefficients using a turbulent flow model for the turbulent range of the flow. Good agreement was found between the numerical predictions and experiments. The numerical results also provided valuable insight into the flow patterns formed due to multiple jet interactions. Average Nusselt number and pressure drop coefficient values found in the present study correspond well with the existing correlations pertinent to jet array impingement.

Original languageEnglish
Article number113716
JournalApplied Thermal Engineering
StatePublished - 25 Jul 2019


  • HFE-7000
  • Jet impingement
  • Local heat flux
  • Micro fabrication
  • Micro scale

ASJC Scopus subject areas

  • Energy Engineering and Power Technology
  • Industrial and Manufacturing Engineering


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