Longitudinal spatial coherence applied for surface profilometry

Joseph Rosen, Mitsuo Takeda

Research output: Contribution to journalArticlepeer-review

98 Scopus citations


A method of optical coherence profilometry, believed to be new, is demonstrated. This method is based on the spatial, rather than the temporal, coherence phenomenon. Therefore the proposed interferometric system is illuminated by a quasi-monochromatic spatial incoherent source instead of a broadband light source. The surface profile is measured by means of shifting the spatial degree of coherence gradually along its longitudinal axis while keeping the optical path difference between the measured surface and a reference plane constant. Experimental proof of the new principle is presented.

Original languageEnglish
Pages (from-to)4107-4111
Number of pages5
JournalApplied Optics
Issue number23
StatePublished - 10 Aug 2000

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering


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