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Longitudinal spatial coherence applied for surface profilometry
Joseph Rosen
, Mitsuo Takeda
School of Electrical and Computer Engineering
Research output
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Contribution to journal
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Article
›
peer-review
102
Scopus citations
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Dive into the research topics of 'Longitudinal spatial coherence applied for surface profilometry'. Together they form a unique fingerprint.
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Keyphrases
Longitudinal Axis
100%
Temporal Coherence
100%
Surface Profile
100%
Optical Path Difference
100%
Quasi-monochromatic
100%
Experimental Proofs
100%
New Principle
100%
Longitudinal Coherence
100%
Degree of Coherence
100%
Surface Profilometry
100%
Profilometry
100%
Interferometric System
100%
Incoherent Sources
100%
Reference Plane
100%
Optical Coherence
100%
Broadband Light Source
100%
Engineering
Optical Path
100%
Longitudinal Axis
100%
Path Difference
100%
Surface Profile
100%
Reference Plane
100%
Broadband Light Source
100%
Physics
Coherence
100%
Light Source
25%
Optical Path
25%