TY - GEN
T1 - Low coherence full field interference microscopy or optical coherence tomography
T2 - Optical Measurement Systems for Industrial Inspection VIII
AU - Abdulhalim, I.
PY - 2013/8/1
Y1 - 2013/8/1
N2 - Although low coherence microscopy (LCM) has been known for long time in the context of interference microscopy, coherence radar and white light interferometry, the whole subject has attracted a wide interest in the last two decades particularly accelerated by the entrance of OCT, as a noninvasive powerful technique for biomedical imaging. Today LCM can be classified into two types, both acts as three-dimensional imaging tool. The first is low temporal coherence microscopy; also known as optical coherence tomography (OCT), which is being used for medical diagnostics. The second is full field OCT in various modes and applied to various applications. FF-OCT uses low spatial and temporal coherence similar to the well-known coherence probe microscope (CPM) that have been in use for long time in optical metrology. The CPM has many advantages over conventional microscopy in its ability to discriminate between different transparent layers in a scattering medium thus allowing for precise noninvasive optical probing of dense tissue and other turbid media. In this paper the status of this technology in optical metrology applications will be discussed, on which we have been working to improve its performance, as well as its limitations and future prospective.
AB - Although low coherence microscopy (LCM) has been known for long time in the context of interference microscopy, coherence radar and white light interferometry, the whole subject has attracted a wide interest in the last two decades particularly accelerated by the entrance of OCT, as a noninvasive powerful technique for biomedical imaging. Today LCM can be classified into two types, both acts as three-dimensional imaging tool. The first is low temporal coherence microscopy; also known as optical coherence tomography (OCT), which is being used for medical diagnostics. The second is full field OCT in various modes and applied to various applications. FF-OCT uses low spatial and temporal coherence similar to the well-known coherence probe microscope (CPM) that have been in use for long time in optical metrology. The CPM has many advantages over conventional microscopy in its ability to discriminate between different transparent layers in a scattering medium thus allowing for precise noninvasive optical probing of dense tissue and other turbid media. In this paper the status of this technology in optical metrology applications will be discussed, on which we have been working to improve its performance, as well as its limitations and future prospective.
KW - Full field optical coherence tomography
KW - Interference microscopy
KW - Linnik microscope
KW - Low coherence microscopy
KW - Mirau Microscope
UR - http://www.scopus.com/inward/record.url?scp=84880734206&partnerID=8YFLogxK
U2 - 10.1117/12.2025199
DO - 10.1117/12.2025199
M3 - Conference contribution
AN - SCOPUS:84880734206
SN - 9780819496041
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Optical Measurement Systems for Industrial Inspection VIII
Y2 - 13 May 2013 through 16 May 2013
ER -