Manufacturing considerations for implementation of scatterometry for process monitoring

John Allgair, Dave Benoit, Rob Hershey, Lloyd C. Litt, Ibrahim Abdulhalim, Bill Braymer, Michael Faeyrman, John C. Robinson, Umar Whitney, Yiping Xu, Piotr Zalicki, Joel Seligson

Research output: Contribution to journal › Conference article › peer-review

38 Scopus citations