Measuring a diffracting structure, broadband, polarized, ellipsometric, and an underlying structure

Xu Yiping (Inventor), Abdulhalim Ibrahim (Inventor)

Research output: Patent

Original languageEnglish
Patent numberAU3310999
IPCH01L 21/ 66 A I
Priority date25/02/99
StatePublished - 20 Sep 1999

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