| Original language | English |
|---|---|
| Patent number | AU3310999 |
| IPC | H01L 21/ 66 A I |
| Priority date | 25/02/99 |
| State | Published - 20 Sep 1999 |
Measuring a diffracting structure, broadband, polarized, ellipsometric, and an underlying structure
Xu Yiping (Inventor), Abdulhalim Ibrahim (Inventor)
Research output: Patent