Original language | English |
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Patent number | AU3310999 |
IPC | H01L 21/ 66 A I |
Priority date | 25/02/99 |
State | Published - 20 Sep 1999 |
Measuring a diffracting structure, broadband, polarized, ellipsometric, and an underlying structure
Xu Yiping (Inventor), Abdulhalim Ibrahim (Inventor)
Research output: Patent