METHOD AND SYSTEM FOR EVALUATING A MACHINE TOOL OPERATING CHARACTERISTICS

Adam Daniel Ticknor; Timothy M McCormack; Noam Slonim; Fateh A Tipu; Adam D Ticknor; Ehud Aharoni; Robert J Baseman; Ramona Kei; Oded Margalit; Kevin MacKey; Michal Rosen-Zvi; Raminderpal Singh; Noam Slomin; Hong Lin; Fateh Ali Tipu

METHOD AND SYSTEM FOR EVALUATING A MACHINE TOOL OPERATING CHARACTERISTICS

Adam Daniel Ticknor (Inventor), Timothy M McCormack (Inventor), Noam Slonim (Inventor), Fateh A Tipu (Inventor), Adam D Ticknor (Inventor), Ehud Aharoni (Inventor), Robert J Baseman (Inventor), Ramona Kei (Inventor), Oded Margalit (Inventor), Kevin MacKey (Inventor), Michal Rosen-Zvi (Inventor), Raminderpal Singh (Inventor), Noam Slomin (Inventor), Hong Lin (Inventor), Fateh Ali Tipu (Inventor)

Department of Computer Science

Research output: Patent

Abstract

A method, a system and a computer program product suitable for use in a manufacturing environment comprising a multiplicity of nominally identical independent tools. A computing device generates a multi dimensional array of process trace data derived from at least one of the independent tools, wherein, the array includes data representing a first dimension comprising a list of steps in a manufacturing recipe and data representing a second dimension comprising a list of a set of sensors generating measurements from at least one of the independent tools. The computing device conducts an analysis on at least one preselected subset of the multi dimensional array for the purpose of evaluating at least one operating characteristic of at least one of the independent tools. The computing device presents results of the analysis via a set of hierarchically linked and browseable graphics.

Original language	English
Patent number	US2013006406
IPC	G05B 19/ 18 A I
Priority date	10/09/12
State	Published - 3 Jan 2013

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Ticknor, Adam Daniel (Inventor) ; McCormack, Timothy M (Inventor) ; Slonim, Noam (Inventor) ; Tipu, Fateh A (Inventor) ; Ticknor, Adam D (Inventor) ; Aharoni, Ehud (Inventor) ; Baseman, Robert J (Inventor) ; Kei, Ramona (Inventor) ; Margalit, Oded (Inventor) ; MacKey, Kevin (Inventor) ; Rosen-Zvi, Michal (Inventor) ; Singh, Raminderpal (Inventor) ; Slomin, Noam (Inventor) ; Lin, Hong (Inventor) ; Tipu, Fateh Ali (Inventor). / METHOD AND SYSTEM FOR EVALUATING A MACHINE TOOL OPERATING CHARACTERISTICS. Patent No.: US2013006406. Jan 03, 2013.

@misc{c200e0ee1978462db6c25ec862f6219f,

title = "METHOD AND SYSTEM FOR EVALUATING A MACHINE TOOL OPERATING CHARACTERISTICS",

abstract = "A method, a system and a computer program product suitable for use in a manufacturing environment comprising a multiplicity of nominally identical independent tools. A computing device generates a multi dimensional array of process trace data derived from at least one of the independent tools, wherein, the array includes data representing a first dimension comprising a list of steps in a manufacturing recipe and data representing a second dimension comprising a list of a set of sensors generating measurements from at least one of the independent tools. The computing device conducts an analysis on at least one preselected subset of the multi dimensional array for the purpose of evaluating at least one operating characteristic of at least one of the independent tools. The computing device presents results of the analysis via a set of hierarchically linked and browseable graphics.",

author = "Ticknor, {Adam Daniel} and McCormack, {Timothy M} and Noam Slonim and Tipu, {Fateh A} and Ticknor, {Adam D} and Ehud Aharoni and Baseman, {Robert J} and Ramona Kei and Oded Margalit and Kevin MacKey and Michal Rosen-Zvi and Raminderpal Singh and Noam Slomin and Hong Lin and Tipu, {Fateh Ali}",

year = "2013",

month = jan,

day = "3",

language = "English",

type = "Patent",

note = "US2013006406; G05B 19/ 18 A I",

}

METHOD AND SYSTEM FOR EVALUATING A MACHINE TOOL OPERATING CHARACTERISTICS. / Ticknor, Adam Daniel (Inventor); McCormack, Timothy M (Inventor); Slonim, Noam (Inventor); Tipu, Fateh A (Inventor); Ticknor, Adam D (Inventor); Aharoni, Ehud (Inventor); Baseman, Robert J (Inventor); Kei, Ramona (Inventor); Margalit, Oded (Inventor); MacKey, Kevin (Inventor); Rosen-Zvi, Michal (Inventor); Singh, Raminderpal (Inventor); Slomin, Noam (Inventor); Lin, Hong (Inventor); Tipu, Fateh Ali (Inventor).

Patent No.: US2013006406. Jan 03, 2013.

Research output: Patent

TY - PAT

T1 - METHOD AND SYSTEM FOR EVALUATING A MACHINE TOOL OPERATING CHARACTERISTICS

AU - Ticknor, Adam Daniel

AU - McCormack, Timothy M

AU - Slonim, Noam

AU - Tipu, Fateh A

AU - Ticknor, Adam D

AU - Aharoni, Ehud

AU - Baseman, Robert J

AU - Kei, Ramona

AU - Margalit, Oded

AU - MacKey, Kevin

AU - Rosen-Zvi, Michal

AU - Singh, Raminderpal

AU - Slomin, Noam

AU - Lin, Hong

AU - Tipu, Fateh Ali

PY - 2013/1/3

Y1 - 2013/1/3

N2 - A method, a system and a computer program product suitable for use in a manufacturing environment comprising a multiplicity of nominally identical independent tools. A computing device generates a multi dimensional array of process trace data derived from at least one of the independent tools, wherein, the array includes data representing a first dimension comprising a list of steps in a manufacturing recipe and data representing a second dimension comprising a list of a set of sensors generating measurements from at least one of the independent tools. The computing device conducts an analysis on at least one preselected subset of the multi dimensional array for the purpose of evaluating at least one operating characteristic of at least one of the independent tools. The computing device presents results of the analysis via a set of hierarchically linked and browseable graphics.

AB - A method, a system and a computer program product suitable for use in a manufacturing environment comprising a multiplicity of nominally identical independent tools. A computing device generates a multi dimensional array of process trace data derived from at least one of the independent tools, wherein, the array includes data representing a first dimension comprising a list of steps in a manufacturing recipe and data representing a second dimension comprising a list of a set of sensors generating measurements from at least one of the independent tools. The computing device conducts an analysis on at least one preselected subset of the multi dimensional array for the purpose of evaluating at least one operating characteristic of at least one of the independent tools. The computing device presents results of the analysis via a set of hierarchically linked and browseable graphics.

M3 - Patent

M1 - US2013006406

ER -

METHOD AND SYSTEM FOR EVALUATING A MACHINE TOOL OPERATING CHARACTERISTICS

Abstract

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