METHOD AND SYSTEM FOR EVALUATING A MACHINE TOOL OPERATING CHARACTERISTICS

Adam Daniel Ticknor (Inventor), Timothy M McCormack (Inventor), Noam Slonim (Inventor), Fateh A Tipu (Inventor), Adam D Ticknor (Inventor), Ehud Aharoni (Inventor), Robert J Baseman (Inventor), Ramona Kei (Inventor), Oded Margalit (Inventor), Kevin MacKey (Inventor), Michal Rosen-Zvi (Inventor), Raminderpal Singh (Inventor), Noam Slomin (Inventor), Hong Lin (Inventor), Fateh Ali Tipu (Inventor)

Research output: Patent

Abstract

A method, a system and a computer program product suitable for use in a manufacturing environment comprising a multiplicity of nominally identical independent tools. A computing device generates a multi dimensional array of process trace data derived from at least one of the independent tools, wherein, the array includes data representing a first dimension comprising a list of steps in a manufacturing recipe and data representing a second dimension comprising a list of a set of sensors generating measurements from at least one of the independent tools. The computing device conducts an analysis on at least one preselected subset of the multi dimensional array for the purpose of evaluating at least one operating characteristic of at least one of the independent tools. The computing device presents results of the analysis via a set of hierarchically linked and browseable graphics.

Original languageEnglish
Patent numberUS2013006406
IPCG05B 19/ 18 A I
Priority date10/09/12
StatePublished - 3 Jan 2013

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