METHOD AND SYSTEM FOR EVALUATING A MACHINE TOOL OPERATING CHARACTERISTICS

Adam Daniel Ticknor; Timothy M McCormack; Fateh A Tipu; Adam D Ticknor; Ehud Aharoni; Robert J Baseman; Ramona Kei; Oded Margalit; Kevin MacKey; Michal Rosen-Zvi; Raminderpal Singh; Noam Slonim; Hong Lin; Fateh All Tipu

METHOD AND SYSTEM FOR EVALUATING A MACHINE TOOL OPERATING CHARACTERISTICS

Adam Daniel Ticknor (Inventor), Timothy M McCormack (Inventor), Fateh A Tipu (Inventor), Adam D Ticknor (Inventor), Ehud Aharoni (Inventor), Robert J Baseman (Inventor), Ramona Kei (Inventor), Oded Margalit (Inventor), Kevin MacKey (Inventor), Michal Rosen-Zvi (Inventor), Raminderpal Singh (Inventor), Noam Slonim (Inventor), Hong Lin (Inventor), Fateh All Tipu (Inventor)

Department of Computer Science

Research output: Patent

Abstract

A method and system for evaluating a performance of a semiconductor manufacturing tool while manufacturing microelectronic devices are disclosed. At least one report is generated based on executions of at least one statistical test. The report includes at least one heat map having rows that correspond to sensors, columns that correspond to trace data obtained during recipe steps, and cells at the intersection of the rows and the columns. At least one sensor in the tool obtains trace data of a recipe step while manufacturing at least one microelectronic device. A computing device analyzes the obtained trace data to determine a level of operational significance found in the data and assigns a score to the trace data that indicates a level of operational significance. Then, the computing device places the score in a corresponding cell of the heat map. A user uses the cell for evaluating the tool performance.

Original language	English
Patent number	US2010249976
IPC	G06F 17/ 00 A I
Priority date	31/03/09
State	Published - 30 Sep 2010

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title = "METHOD AND SYSTEM FOR EVALUATING A MACHINE TOOL OPERATING CHARACTERISTICS",

abstract = "A method and system for evaluating a performance of a semiconductor manufacturing tool while manufacturing microelectronic devices are disclosed. At least one report is generated based on executions of at least one statistical test. The report includes at least one heat map having rows that correspond to sensors, columns that correspond to trace data obtained during recipe steps, and cells at the intersection of the rows and the columns. At least one sensor in the tool obtains trace data of a recipe step while manufacturing at least one microelectronic device. A computing device analyzes the obtained trace data to determine a level of operational significance found in the data and assigns a score to the trace data that indicates a level of operational significance. Then, the computing device places the score in a corresponding cell of the heat map. A user uses the cell for evaluating the tool performance.",

author = "Ticknor, {Adam Daniel} and McCormack, {Timothy M} and Tipu, {Fateh A} and Ticknor, {Adam D} and Ehud Aharoni and Baseman, {Robert J} and Ramona Kei and Oded Margalit and Kevin MacKey and Michal Rosen-Zvi and Raminderpal Singh and Noam Slonim and Hong Lin and Tipu, {Fateh All}",

year = "2010",

month = sep,

day = "30",

language = "English",

type = "Patent",

note = "US2010249976; G06F 17/ 00 A I",

}

TY - PAT

T1 - METHOD AND SYSTEM FOR EVALUATING A MACHINE TOOL OPERATING CHARACTERISTICS

AU - Ticknor, Adam Daniel

AU - McCormack, Timothy M

AU - Tipu, Fateh A

AU - Ticknor, Adam D

AU - Aharoni, Ehud

AU - Baseman, Robert J

AU - Kei, Ramona

AU - Margalit, Oded

AU - MacKey, Kevin

AU - Rosen-Zvi, Michal

AU - Singh, Raminderpal

AU - Slonim, Noam

AU - Lin, Hong

AU - Tipu, Fateh All

PY - 2010/9/30

Y1 - 2010/9/30

N2 - A method and system for evaluating a performance of a semiconductor manufacturing tool while manufacturing microelectronic devices are disclosed. At least one report is generated based on executions of at least one statistical test. The report includes at least one heat map having rows that correspond to sensors, columns that correspond to trace data obtained during recipe steps, and cells at the intersection of the rows and the columns. At least one sensor in the tool obtains trace data of a recipe step while manufacturing at least one microelectronic device. A computing device analyzes the obtained trace data to determine a level of operational significance found in the data and assigns a score to the trace data that indicates a level of operational significance. Then, the computing device places the score in a corresponding cell of the heat map. A user uses the cell for evaluating the tool performance.

AB - A method and system for evaluating a performance of a semiconductor manufacturing tool while manufacturing microelectronic devices are disclosed. At least one report is generated based on executions of at least one statistical test. The report includes at least one heat map having rows that correspond to sensors, columns that correspond to trace data obtained during recipe steps, and cells at the intersection of the rows and the columns. At least one sensor in the tool obtains trace data of a recipe step while manufacturing at least one microelectronic device. A computing device analyzes the obtained trace data to determine a level of operational significance found in the data and assigns a score to the trace data that indicates a level of operational significance. Then, the computing device places the score in a corresponding cell of the heat map. A user uses the cell for evaluating the tool performance.

M3 - Patent

M1 - US2010249976

ER -

METHOD AND SYSTEM FOR EVALUATING A MACHINE TOOL OPERATING CHARACTERISTICS

Abstract

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