METHOD AND SYSTEM FOR EVALUATING A MACHINE TOOL OPERATING CHARACTERISTICS

Adam Daniel Ticknor (Inventor), Timothy M McCormack (Inventor), Fateh A Tipu (Inventor), Adam D Ticknor (Inventor), Ehud Aharoni (Inventor), Robert J Baseman (Inventor), Ramona Kei (Inventor), Oded Margalit (Inventor), Kevin MacKey (Inventor), Michal Rosen-Zvi (Inventor), Raminderpal Singh (Inventor), Noam Slonim (Inventor), Hong Lin (Inventor), Fateh All Tipu (Inventor)

Research output: Patent

Abstract

A method and system for evaluating a performance of a semiconductor manufacturing tool while manufacturing microelectronic devices are disclosed. At least one report is generated based on executions of at least one statistical test. The report includes at least one heat map having rows that correspond to sensors, columns that correspond to trace data obtained during recipe steps, and cells at the intersection of the rows and the columns. At least one sensor in the tool obtains trace data of a recipe step while manufacturing at least one microelectronic device. A computing device analyzes the obtained trace data to determine a level of operational significance found in the data and assigns a score to the trace data that indicates a level of operational significance. Then, the computing device places the score in a corresponding cell of the heat map. A user uses the cell for evaluating the tool performance.

Original languageEnglish GB
Patent numberUS2010249976
IPCG06F 17/ 00 A I
Priority date31/03/09
StatePublished - 30 Sep 2010

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