Microstructure of ZnO films produced by reactive DC sputtering technique

S. Ghosh; A. Sarkar; S. Bhattacharya; S. Chaudhuri; A. K. Pal

doi:10.1016/0022-0248(91)90231-S

Microstructure of ZnO films produced by reactive DC sputtering technique

S. Ghosh, A. Sarkar, S. Bhattacharya, S. Chaudhuri, A. K. Pal

Research output: Contribution to journal › Article › peer-review

39 Scopus citations

Abstract

The effect of grain growth of zinc oxide films deposited by using a reactive DC magnetron sputtering technique was studied as a function of annealing temperature. The results are correlated with the observed electrical and optical studies.

Original language	English
Pages (from-to)	534-540
Number of pages	7
Journal	Journal of Crystal Growth
Volume	108
Issue number	3-4
DOIs	https://doi.org/10.1016/0022-0248(91)90231-S
State	Published - 1 Feb 1991
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Inorganic Chemistry
Materials Chemistry

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title = "Microstructure of ZnO films produced by reactive DC sputtering technique",

abstract = "The effect of grain growth of zinc oxide films deposited by using a reactive DC magnetron sputtering technique was studied as a function of annealing temperature. The results are correlated with the observed electrical and optical studies.",

author = "S. Ghosh and A. Sarkar and S. Bhattacharya and S. Chaudhuri and Pal, {A. K.}",

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AU - Ghosh, S.

AU - Sarkar, A.

AU - Bhattacharya, S.

AU - Chaudhuri, S.

AU - Pal, A. K.

PY - 1991/2/1

Y1 - 1991/2/1

N2 - The effect of grain growth of zinc oxide films deposited by using a reactive DC magnetron sputtering technique was studied as a function of annealing temperature. The results are correlated with the observed electrical and optical studies.

AB - The effect of grain growth of zinc oxide films deposited by using a reactive DC magnetron sputtering technique was studied as a function of annealing temperature. The results are correlated with the observed electrical and optical studies.

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DO - 10.1016/0022-0248(91)90231-S

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SP - 534

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JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 3-4

ER -

Microstructure of ZnO films produced by reactive DC sputtering technique

Abstract

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