Microstructure of ZnO films produced by reactive DC sputtering technique

S. Ghosh, A. Sarkar, S. Bhattacharya, S. Chaudhuri, A. K. Pal

Research output: Contribution to journalArticlepeer-review

39 Scopus citations


The effect of grain growth of zinc oxide films deposited by using a reactive DC magnetron sputtering technique was studied as a function of annealing temperature. The results are correlated with the observed electrical and optical studies.

Original languageEnglish
Pages (from-to)534-540
Number of pages7
JournalJournal of Crystal Growth
Issue number3-4
StatePublished - 1 Feb 1991
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry


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