Modeling the variance of the durations of maintenance activities in semiconductor fabs

Itai Regev, Yisrael Parmet, Diamanta Benson-Karhi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The reduction of equipment variability of availability can significantly reduce cycle times, improve yields, reduce time-to-market and lower overall operational costs. Despite extensive efforts to reduce variability of availability, however, the execution of preventive maintenance (PM) is still one of the main sources of equipment variability of availability in the industry. In this paper, a model for PM duration variance is proposed. The model is based on the parts of the PM and the standard PM flow, and it provides a framework for modeling and segmenting the PM duration variance in the semiconductor industry while highlighting inefficiencies and improvement opportunities.

Original languageEnglish
Title of host publication2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages100-105
Number of pages6
ISBN (Electronic)9781509002702
DOIs
StatePublished - 13 Jun 2016
Event27th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2016 - Saratoga Springs, United States
Duration: 16 May 201619 May 2016

Publication series

Name2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2016

Conference

Conference27th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2016
Country/TerritoryUnited States
CitySaratoga Springs
Period16/05/1619/05/16

Keywords

  • Availability
  • Imperfect PM
  • Optimization
  • Preventive Maintenance (PM)
  • Variability of Availability

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