Abstract
Theoretical work of our group is placed in the general frame of efforts to improve numerical performance and efficiency of rigorous coupled-wave analysis of grating diffraction. Mathematical transformation of Maxwell equations for a multi-layered structure to evolution equations in functional space is presented. By-construction numerically stable symbolic algorithm to solve these equations using the notion of in-layer scattering operator is proposed. On the base of this algorithm a toolbox for simulation of diffraction from multi-layered grating structures, implemented by a graphical user interface is developed. An example of simulation using this in-house software is exposed.
Original language | English |
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Pages (from-to) | 463-473 |
Number of pages | 11 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 5349 |
DOIs | |
State | Published - 16 Aug 2004 |
Event | Physics and Simulation of Optoelectronic Devices XII - San Jose, CA, United States Duration: 26 Jan 2004 → 29 Jan 2004 |
Keywords
- Diffraction theory
- Grating
- Mode-matching methods
- Multi-layered structure
- S-matrix algorithm
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering