Abstract
A system microscopy system and method that enable obtaining high resolution 3D images in a single shot are presented. The system is an ultra-high speed, real time multi wavelength phase shift interference microscopy system that uses three synchronized color CCD cameras. Each CCD is equipped with a precision achromatic phase mask which in turn allows obtaining π/2 phase shifted signals in three different wavelengths simultaneously.
Original language | English |
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Patent number | US9880377 |
IPC | G02B 27/ 28 A I |
Priority date | 9/09/16 |
State | Published - 30 Jan 2018 |