Abstract
Recent progress achieved in the fields of micro and nanoelectromechanical systems demands a reliable method for high resolution characterization of electrostatically actuated devices. This paper presents a study on optical detection of nanoscale displacements using digital image correlation (DIC) algorithms, commonly used in characterization of in-plane displacements. Optical images of an electrostatically actuated micro electromechanical systems (MEMS) device were processed using a modified drift corrected DIC (DC-DIC) algorithm and the results were analyzed. Using the DC-DIC, the resolution was enhanced significantly and displacement measurements with nanoscale accuracy were captured using standard optics and processing tools. The present study provides a simple and reliable technique for optical characterization of rigid body nanoscale displacements of micro devices.
| Original language | English |
|---|---|
| Pages (from-to) | 1-7 |
| Number of pages | 7 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 162 |
| Issue number | 1 |
| DOIs | |
| State | Published - 1 Jul 2010 |
| Externally published | Yes |
Keywords
- Digital image correlation
- Drift distortion
- MEMS
- Nanoscale displacement
- Optical measurement
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering