Nanoscale displacement measurement of electrostatically actuated micro-devices using optical microscopy and digital image correlation

Assaf Ya'akobovitz, Slava Krylov, Yael Hanein

Research output: Contribution to journalArticlepeer-review

37 Scopus citations

Abstract

Recent progress achieved in the fields of micro and nanoelectromechanical systems demands a reliable method for high resolution characterization of electrostatically actuated devices. This paper presents a study on optical detection of nanoscale displacements using digital image correlation (DIC) algorithms, commonly used in characterization of in-plane displacements. Optical images of an electrostatically actuated micro electromechanical systems (MEMS) device were processed using a modified drift corrected DIC (DC-DIC) algorithm and the results were analyzed. Using the DC-DIC, the resolution was enhanced significantly and displacement measurements with nanoscale accuracy were captured using standard optics and processing tools. The present study provides a simple and reliable technique for optical characterization of rigid body nanoscale displacements of micro devices.

Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalSensors and Actuators, A: Physical
Volume162
Issue number1
DOIs
StatePublished - 1 Jul 2010
Externally publishedYes

Keywords

  • Digital image correlation
  • Drift distortion
  • MEMS
  • Nanoscale displacement
  • Optical measurement

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