New micro-optical devices for the IR based on three-component amorphous chalcogenide photoresists

N. P. Eisenberg, M. Manevich, A. Arsh, M. Klebanov, V. Lyubin

Research output: Contribution to journalArticlepeer-review

14 Scopus citations

Abstract

New micro-optical elements for the IR: micro-lens, micro-prism, micro-mirror arrays and Fresnel lenses with a wide variation of their parameters were fabricated using a three-component. As-S-Se chalcogenide photoresist and a new efficient amine-based selective developer, which together allowed the realization of soft contrast characteristics of the photolithographic process when used with Xe-light source.

Original languageEnglish
Pages (from-to)1632-1636
Number of pages5
JournalJournal of Non-Crystalline Solids
Volume352
Issue number9-20 SPEC. ISS.
DOIs
StatePublished - 15 Jun 2006

Keywords

  • Chalcogenides
  • Devices
  • Photochromics
  • Photoinduced effects
  • Sensors

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Materials Chemistry

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