New micro-optical devices for the IR based on three-component amorphous chalcogenide photoresists

N. P. Eisenberg; M. Manevich; A. Arsh; M. Klebanov; V. Lyubin

doi:10.1016/j.jnoncrysol.2005.10.053

New micro-optical devices for the IR based on three-component amorphous chalcogenide photoresists

N. P. Eisenberg, M. Manevich, A. Arsh, M. Klebanov, V. Lyubin

Department of Physics

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Abstract

New micro-optical elements for the IR: micro-lens, micro-prism, micro-mirror arrays and Fresnel lenses with a wide variation of their parameters were fabricated using a three-component. As-S-Se chalcogenide photoresist and a new efficient amine-based selective developer, which together allowed the realization of soft contrast characteristics of the photolithographic process when used with Xe-light source.

Original language	English
Pages (from-to)	1632-1636
Number of pages	5
Journal	Journal of Non-Crystalline Solids
Volume	352
Issue number	9-20 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.jnoncrysol.2005.10.053
State	Published - 15 Jun 2006

Keywords

Chalcogenides
Devices
Photochromics
Photoinduced effects
Sensors

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Condensed Matter Physics
Materials Chemistry

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10.1016/j.jnoncrysol.2005.10.053

Cite this

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abstract = "New micro-optical elements for the IR: micro-lens, micro-prism, micro-mirror arrays and Fresnel lenses with a wide variation of their parameters were fabricated using a three-component. As-S-Se chalcogenide photoresist and a new efficient amine-based selective developer, which together allowed the realization of soft contrast characteristics of the photolithographic process when used with Xe-light source.",

keywords = "Chalcogenides, Devices, Photochromics, Photoinduced effects, Sensors",

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AU - Eisenberg, N. P.

AU - Manevich, M.

AU - Arsh, A.

AU - Klebanov, M.

AU - Lyubin, V.

PY - 2006/6/15

Y1 - 2006/6/15

N2 - New micro-optical elements for the IR: micro-lens, micro-prism, micro-mirror arrays and Fresnel lenses with a wide variation of their parameters were fabricated using a three-component. As-S-Se chalcogenide photoresist and a new efficient amine-based selective developer, which together allowed the realization of soft contrast characteristics of the photolithographic process when used with Xe-light source.

AB - New micro-optical elements for the IR: micro-lens, micro-prism, micro-mirror arrays and Fresnel lenses with a wide variation of their parameters were fabricated using a three-component. As-S-Se chalcogenide photoresist and a new efficient amine-based selective developer, which together allowed the realization of soft contrast characteristics of the photolithographic process when used with Xe-light source.

KW - Chalcogenides

KW - Devices

KW - Photochromics

KW - Photoinduced effects

KW - Sensors

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U2 - 10.1016/j.jnoncrysol.2005.10.053

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JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

IS - 9-20 SPEC. ISS.

ER -

New micro-optical devices for the IR based on three-component amorphous chalcogenide photoresists

Abstract

Keywords

ASJC Scopus subject areas

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