Non-coplanar reciprocal space mapping of In0.2Ga0.8As/GaAs multilayer: Modelling of the composition and strain distribution

  • D. Mogilyanski
  • , E. Gartstein

    Research output: Contribution to journalArticlepeer-review

    Abstract

    Reciprocal space mapping in non-coplanar diffraction geometry using a triple-crystal diffractometer is applied to study strained In0.2Ga0.8As/GaAs multilayer. The modelling accounts for the measured integrated intensities of the satellites in the simulation of the reciprocal space map to provide compositional profile of In distribution in the nucleated islands on the interfaces. Theoretical approach to calculate the intensity in this unconventional geometry is discussed.

    Original languageEnglish
    Pages (from-to)A181-A187
    JournalJournal of Physics D: Applied Physics
    Volume36
    Issue number10 A
    DOIs
    StatePublished - 21 May 2003

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Acoustics and Ultrasonics
    • Surfaces, Coatings and Films

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