Abstract
Reciprocal space mapping in non-coplanar diffraction geometry using a triple-crystal diffractometer is applied to study strained In0.2Ga0.8As/GaAs multilayer. The modelling accounts for the measured integrated intensities of the satellites in the simulation of the reciprocal space map to provide compositional profile of In distribution in the nucleated islands on the interfaces. Theoretical approach to calculate the intensity in this unconventional geometry is discussed.
| Original language | English |
|---|---|
| Pages (from-to) | A181-A187 |
| Journal | Journal of Physics D: Applied Physics |
| Volume | 36 |
| Issue number | 10 A |
| DOIs | |
| State | Published - 21 May 2003 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Acoustics and Ultrasonics
- Surfaces, Coatings and Films