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Non-linear dissolution of amorphous arsenic sulfide-selenide photoresist films
V. Lyubin, A. Arsh, M. Klebanov, M. Manevich, J. Varshal, R. Dror, B. Sfez, A. V. Latyshev, D. A. Nasimov, N. P. Eisenberg
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations