@inproceedings{09e4fd2f49b142d1bca8bfa606fcddf6,
title = "Nonlinear Mode Coupling in a MEMS Resonator",
abstract = "A single micro-electromechanical (MEMS) resonator can be shown to exhibit behaviors unexpected in a simple resonant structure. For small driving forces, the resonator displays typical simple harmonic oscillator response. As the driving force is increased, the resonator shows the slightly more complex, but well understood, Duffing response. Rather unexpected response behavior can appear when the resonator frequency is detuned by nonlinearity to where two oscillatory modes of the resonator begin to interact through nonlinear coupling due to an internal resonance. The paper focuses on how the resonator response changes as the internal resonance is approached in the operating parameter space and how that behavior is conveniently represented in a bifurcation diagram. This behavior is accurately captured by a generic mathematical model. We describe an analysis of the model which shows how this coupled response varies with the system and drive parameters, especially focusing on the nonlinear coupling strength between the two modes.",
keywords = "Bifurcation diagram, Coupling strength, MEMS, Mode coupling, NEMS, Non-linear, Resonance",
author = "Czaplewski, {David A.} and Daniel L{\'o}pez and Oriel Shoshani and Shaw, {Steven W.}",
note = "Funding Information: and SWS and OS are supported by BSF grant 2018041. Funding Information: Energy Office of Science User Facility, and supported by the U.S. Department of Energy, Office Funding Information: of Science, under Contract No. DE-AC02-06CH11357. SWS is supported by NSF grant 1662619, Publisher Copyright: {\textcopyright} 2020 SPIE; Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020 ; Conference date: 24-02-2020 Through 27-02-2020",
year = "2020",
month = mar,
day = "23",
doi = "10.1117/12.2551883",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Sanchez, {Martha I.} and Panning, {Eric M.}",
booktitle = "Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020",
address = "United States",
}