Nonlinear photoresist films fabricated by coevaporation of As 2S3 glass and silver

V. Lyubin, A. Arsh, M. Klebanov, N. Sroumin, K. Kantarovich, I. Bar, R. Dror, B. Sfez

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

Silver metal evaporated below or above a layer of AS2S 3 glass are known to propagate under action of light within the glass layer and strongly modify its photochemical properties. We demonstrate that when silver is co-evaporated together with the glass, and within a certain range of silver concentration, this property is conserved locally. This leads to a new kind of photosensitive effect in the chalcogenide glass with completely new photoresist properties such as giant contrast and superlinear dissolution. These new properties make silver doped AS2S3 glass an ideal material for the fabrication of three-dimensional structures with sub-micron feature size. The effect is explained within a percolation model. The advantages of superlinear photoresists, especially for the case of maskless photolithography, are shortly discussed.

Original languageEnglish
Pages (from-to)3182-3187
Number of pages6
JournalJournal of Optoelectronics and Advanced Materials
Volume10
Issue number12
StatePublished - 1 Jan 2008

Keywords

  • AsS + silver
  • Coevaporation
  • Nonlinear photoresist
  • Thin films

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