| Original language | English |
|---|---|
| Patent number | EP1718562 |
| IPC | H01L 29/ 06 A I |
| Priority date | 3/02/05 |
| State | Published - 8 Nov 2006 |
Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver
Research output: Patent
| Original language | English |
|---|---|
| Patent number | EP1718562 |
| IPC | H01L 29/ 06 A I |
| Priority date | 3/02/05 |
| State | Published - 8 Nov 2006 |