Abstract
Based on a simulated fab, we first show that forecasting the steady state cycle time of process segments is possible based on certain segment characteristics. We then show that the cycle time predictability is highly dependent on the choice of the segmentation, with the more efficient segmentation corresponding to the product layers.
| Original language | English |
|---|---|
| Article number | 6607229 |
| Pages (from-to) | 613-618 |
| Number of pages | 6 |
| Journal | IEEE Transactions on Semiconductor Manufacturing |
| Volume | 26 |
| Issue number | 4 |
| DOIs | |
| State | Published - 25 Nov 2013 |
| Externally published | Yes |
Keywords
- Cycle time
- Data mining
- Production management
- Semiconductors
- Simulation
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Industrial and Manufacturing Engineering
- Electrical and Electronic Engineering
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