On the accuracy of analytic approximations for the mean cycle time in semiconductor manufacturing equipment with PM events

Minho Lee, James R. Morrison, Adar A. Kalir, Kosta Rozen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Preventive Maintenance activities (PMs) are essential for semiconductor manufacturing equipment. Since PMs are typically non-preemptive, they are usually modeled as high priority customers. We examine the accuracy of a popular approximation for the mean cycle time in G/G/1 queues with high priority PM customers. This approximation follows Kingman's and is based on a heavy traffic assumption. We observe that the approximations can perform very poorly when the mean and coefficient of variation of the PM durations are large and small, respectively. This is precisely the practical case for PMs in semiconductor manufacturing. We propose two practical correction candidates and assess their effectiveness. SPECIAL SESSION CODE = 4yd3b.

Original languageEnglish
Title of host publication2017 13th IEEE Conference on Automation Science and Engineering, CASE 2017
PublisherInstitute of Electrical and Electronics Engineers
Pages737-738
Number of pages2
ISBN (Electronic)9781509067800
DOIs
StatePublished - 1 Jul 2017
Externally publishedYes
Event13th IEEE Conference on Automation Science and Engineering, CASE 2017 - Xi'an, China
Duration: 20 Aug 201723 Aug 2017

Publication series

NameIEEE International Conference on Automation Science and Engineering
Volume2017-August
ISSN (Print)2161-8070
ISSN (Electronic)2161-8089

Conference

Conference13th IEEE Conference on Automation Science and Engineering, CASE 2017
Country/TerritoryChina
CityXi'an
Period20/08/1723/08/17

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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