One-dimensional antireflection gratings in (100) silicon: A numerical study

Keyphrases

• Grating 100%
• Antireflection 100%
• (100) Silicon 100%
• Duty Cycle 50%
• Diffraction 25%
• Reflectivity 25%
• Incident Radiation 25%
• Fabrication Error 25%
• Crystalline Silicon 25%
• Anti-reflective 25%
• Polarized Radiation 25%
• SiO2 Mask 25%
• Grating Period 25%
• Rigorous Electromagnetic Theory 25%
• Grating Design 25%
• Groove Structure 25%
• Antireflection Property 25%
• Mask Layer 25%

Engineering

• One Dimensional 100%
• Duty Cycle 100%
• Numerical Study 100%
• Illustrates 50%
• Fits and Tolerances 50%
• Incident Radiation 50%
• Mountings 50%
• Crystalline Silicon 50%
• Grating Period 50%

Material Science

• Silicon 100%
• Crystalline Material 50%
• Reflectivity 50%