Optical coherence tomography using broad-bandwidth XUV and soft X-ray radiation

S. Fuchs, A. Blinne, C. Rödel, U. Zastrau, V. Hilbert, M. Wünsche, J. Bierbach, E. Frumker, E. Förster, G. G. Paulus

Research output: Contribution to journalArticlepeer-review

34 Scopus citations

Abstract

We present a novel approach to extend optical coherence tomography (OCT) to the extreme ultraviolet (XUV) and soft X-ray (SXR) spectral range. With a simple setup based on Fourier-domain OCT and adapted for the application of XUV and SXR broadband radiation, cross-sectional images of semiconductors and organic samples becomes feasible with current synchrotron or laser-plasma sources. For this purpose, broadband XUV radiation is focused onto the sample surface, and the reflected spectrum is recorded by an XUV spectrometer. The proposed method has the particular advantage that the axial spatial resolution only depends on the spectral bandwidth. As a consequence, the theoretical resolution limit of XUV coherence tomography (XCT) is in the order of nanometers, e.g., 3 nm for wavelengths in the water window (280-530 eV). We proved the concept of XCT by calculating the reflectivity of one-dimensional silicon and boron carbide samples containing buried layers and found the expected properties with respect to resolution and penetration depth confirmed.

Original languageEnglish
Pages (from-to)789-795
Number of pages7
JournalApplied Physics B: Lasers and Optics
Volume106
Issue number4
DOIs
StatePublished - 1 Mar 2012
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy (all)

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