TY - JOUR
T1 - Optical coherence tomography using broad-bandwidth XUV and soft X-ray radiation
AU - Fuchs, S.
AU - Blinne, A.
AU - Rödel, C.
AU - Zastrau, U.
AU - Hilbert, V.
AU - Wünsche, M.
AU - Bierbach, J.
AU - Frumker, E.
AU - Förster, E.
AU - Paulus, G. G.
N1 - Funding Information:
This work was partially supported by Deutsche Forschungsgemeinschaft (project SFB/TR 18) and the German Federal Ministry for Education (BMBF) (project FSP 301-FLASH). C.R. acknowledges support from the Carl Zeiss Stiftung.
PY - 2012/3/1
Y1 - 2012/3/1
N2 - We present a novel approach to extend optical coherence tomography (OCT) to the extreme ultraviolet (XUV) and soft X-ray (SXR) spectral range. With a simple setup based on Fourier-domain OCT and adapted for the application of XUV and SXR broadband radiation, cross-sectional images of semiconductors and organic samples becomes feasible with current synchrotron or laser-plasma sources. For this purpose, broadband XUV radiation is focused onto the sample surface, and the reflected spectrum is recorded by an XUV spectrometer. The proposed method has the particular advantage that the axial spatial resolution only depends on the spectral bandwidth. As a consequence, the theoretical resolution limit of XUV coherence tomography (XCT) is in the order of nanometers, e.g., 3 nm for wavelengths in the water window (280-530 eV). We proved the concept of XCT by calculating the reflectivity of one-dimensional silicon and boron carbide samples containing buried layers and found the expected properties with respect to resolution and penetration depth confirmed.
AB - We present a novel approach to extend optical coherence tomography (OCT) to the extreme ultraviolet (XUV) and soft X-ray (SXR) spectral range. With a simple setup based on Fourier-domain OCT and adapted for the application of XUV and SXR broadband radiation, cross-sectional images of semiconductors and organic samples becomes feasible with current synchrotron or laser-plasma sources. For this purpose, broadband XUV radiation is focused onto the sample surface, and the reflected spectrum is recorded by an XUV spectrometer. The proposed method has the particular advantage that the axial spatial resolution only depends on the spectral bandwidth. As a consequence, the theoretical resolution limit of XUV coherence tomography (XCT) is in the order of nanometers, e.g., 3 nm for wavelengths in the water window (280-530 eV). We proved the concept of XCT by calculating the reflectivity of one-dimensional silicon and boron carbide samples containing buried layers and found the expected properties with respect to resolution and penetration depth confirmed.
UR - https://www.scopus.com/pages/publications/84859731455
U2 - 10.1007/s00340-012-4934-8
DO - 10.1007/s00340-012-4934-8
M3 - Article
AN - SCOPUS:84859731455
SN - 0946-2171
VL - 106
SP - 789
EP - 795
JO - Applied Physics B: Lasers and Optics
JF - Applied Physics B: Lasers and Optics
IS - 4
ER -