Optical coherence tomography using broad-bandwidth XUV and soft X-ray radiation

Keyphrases

• Optical Coherence Tomography 100%
• Broad Bandwidth 100%
• Soft X-ray 100%
• Soft X-ray Radiation 100%
• Coherence Tomography 100%
• Reflectivity 50%
• Spatial Resolution 50%
• Spectrometer 50%
• Penetration Depth 50%
• Reflectance Spectra 50%
• Spectral Range 50%
• Synchrotron 50%
• Resolution Limit 50%
• Cross-sectional Image 50%
• Semiconductor Samples 50%
• Silicon Carbide 50%
• Fourier-domain Optical Coherence Tomography 50%
• Extreme Ultraviolet 50%
• Water Window 50%
• XUV Radiation 50%
• Spectral Bandwidth 50%
• Broadband Radiation 50%
• Organic Samples 50%
• Buried Layer 50%
• Boron Carbide 50%
• Laser-plasma Source 50%

Material Science

• Optical Coherence Tomography 100%
• Tomography 66%
• Silicon 33%
• Reflectivity 33%
• Carbide 33%
• Boron 33%

Physics

• Coherence 100%
• Tomography 100%
• Synchrotron 20%
• Laser Plasmas 20%
• Silicon Carbide 20%
• Boron Carbide 20%